Handbook of Static Secondary Ion Mass Spectrometry

Handbook of Static Secondary Ion Mass Spectrometry

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  • 製本 Hardcover:ハードカバー版
  • 言語 ENG,ENG
  • 商品コード 9780471916277
  • DDC分類 543.0873

Contents

Part 1 Static secondary ion mass spectrometry for surface chemical characterization: the SIMS phenomenon; the experimental parameters; the SIMS experiment; experimental procedures used in acquisition of spectra. Part 2 Library of spectra. Part 3 Case studies: static SIMS in surface science; cleaning of semiconductor materials; SIMS imaging of the mechanism of oxide growth; the use of MS/MS techniques in materials analysis; SIMS imaging of semiconductor devices. (Part contents).