Handbook of Static Secondary Ion Mass Spectrometry

Briggs, D./ Brown, A./ Vickerman, J. C.

John Wiley & Son Ltd（1989/06発売）

• 製本 Hardcover:ハードカバー版
• 言語 ENG
• 商品コード 9780471916277
• DDC分類 543.0873

Contents

Part 1 Static secondary ion mass spectrometry for surface chemical characterization: the SIMS phenomenon; the experimental parameters; the SIMS experiment; experimental procedures used in acquisition of spectra. Part 2 Library of spectra. Part 3 Case studies: static SIMS in surface science; cleaning of semiconductor materials; SIMS imaging of the mechanism of oxide growth; the use of MS/MS techniques in materials analysis; SIMS imaging of semiconductor devices. (Part contents).